Analysis and modeling of resistive probes

A simple model of the resistive probe was proposed for the first time to enhance its sensitivity. The model classifies output current into three components: sensing current, unmodulated current, and punch-through current. Based on it, the electrical performance of the resistive probe was analyzed. T...

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Bibliographic Details
Main Authors: Kim, Sang Wan, Choa, Sung-Hoon, Lee, Jong Duk, Shin, Hyungcheol, Park, Byung-Gook, Choi, Woo Young, Song, Jae Young, Kim, Jong Pil, Kim, Junsoo, Ko, Hyoungsoo, Park, Hongsik, Park, Chulmin, Hong, Seungbum
Format: Conference Proceeding
Language:English
Subjects:
analysis
Computer science
Electrons
Ferroelectric materials
Microscopy
modeling
Performance analysis
Probes
resistive probe
sensitivity
Silicon
Surface resistance
Temperature sensors
Voltage
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Summary:A simple model of the resistive probe was proposed for the first time to enhance its sensitivity. The model classifies output current into three components: sensing current, unmodulated current, and punch-through current. Based on it, the electrical performance of the resistive probe was analyzed. The proposed model is expected to contribute to improvement of the sensing performance of the resistive probe.
DOI:10.1109/NMDC.2006.4388746