Fabrication of Cylindrical Nanopores and Nanopore Arrays in Silicon-On-Insulator Substrates

Electron-beam lithography and reactive ion etching were used to process silicon-on-insulator substrates for the fabrication of single cylindrical high-aspect-ratio solid-state nanopores and high-packing-density nanopore arrays. Minimum pore diameters of 40 nm were readily achieved with a high yield....

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2007-12, Vol.16 (6), p.1419-1428
Main Authors: Petrossian, L., Wilk, S.J., Joshi, P., Hihath, S., Goodnick, S.M., Thornton, T.J.
Format: Article
Language:English
Subjects:
Apertures
Applied sciences
Arrays
Coulter counting
Devices
Electrical resistance measurement
Electrolytes
Electron beam lithography
Electronics
Exact sciences and technology
Fabrication
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
ion channel
Ion transport
Lithography
Mechanical instruments, equipment and techniques
Microelectromechanical systems
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Nanocomposites
Nanomaterials
nanopore
nanoporous array
Nanoporous materials
Nanostructure
patch clamp
Physics
Porosity
Protein engineering
Reactive ion etching
Reservoirs
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Silicon on insulator technology
silicon-on-insulator (SOI)
Solid state circuits
Wet etching
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Description
Summary:Electron-beam lithography and reactive ion etching were used to process silicon-on-insulator substrates for the fabrication of single cylindrical high-aspect-ratio solid-state nanopores and high-packing-density nanopore arrays. Minimum pore diameters of 40 nm were readily achieved with a high yield. The electrolyte concentration dependence of ion transport through single nanopores was measured for pores with diameters ranging from 40 to 140 nm. Measured single-nanopore conductances in high salt concentrations were compared to a simple model using a cylindrical resistance path and bulk solution conductivity. Electrochemical impedance spectroscopy was used to study the ac response of the device.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2007.908435