Lead-free Piezoelectric Thin Films for Bio-medical Applications

A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based p...

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Bibliographic Details
Main Authors: Seung-Hyun Kim, Koo, C.Y., Cheon, J.-H., Yeom, J.-H., Woo, H.-J., Ha, J.
Format: Conference Proceeding
Language:English
Subjects:
Chemicals
Dielectric substrates
Dielectric thin films
Environmentally friendly manufacturing techniques
Ferroelectric films
Micromechanical devices
Piezoelectric films
Scanning electron microscopy
Semiconductor films
X-ray scattering
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Summary:A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based piezoelectric thin films due to their reasonably good piezoelectric properties even if overall properties are somewhat worse than those of PZT based piezoelectrics. These results indicate that NKN films might be a promising lead-free piezoelectric system for a wide range of bio-compatible MEMS applications.
ISSN:1099-4734
2375-0448
DOI:10.1109/ISAF.2007.4393428