Lead-free Piezoelectric Thin Films for Bio-medical Applications

A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based p...

Full description

Saved in:
Bibliographic Details
Main Authors: Seung-Hyun Kim, Koo, C.Y., Cheon, J.-H., Yeom, J.-H., Woo, H.-J., Ha, J.
Format: Conference Proceeding
Language:English
Subjects:
Chemicals
Dielectric substrates
Dielectric thin films
Environmentally friendly manufacturing techniques
Ferroelectric films
Micromechanical devices
Piezoelectric films
Scanning electron microscopy
Semiconductor films
X-ray scattering
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by
cites
container_end_page 860
container_issue
container_start_page 858
container_title
container_volume
creator Seung-Hyun Kim
Koo, C.Y.
Cheon, J.-H.
Yeom, J.-H.
Woo, H.-J.
Ha, J.
description A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based piezoelectric thin films due to their reasonably good piezoelectric properties even if overall properties are somewhat worse than those of PZT based piezoelectrics. These results indicate that NKN films might be a promising lead-free piezoelectric system for a wide range of bio-compatible MEMS applications.
doi_str_mv 10.1109/ISAF.2007.4393428
format conference_proceeding
fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_4393428</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>4393428</ieee_id><sourcerecordid>4393428</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-137afdb06be34f502b1f8fc166036436fcd5cd3c6494b6683bc52f4423cf3a6e3</originalsourceid><addsrcrecordid>eNo10M1KxDAUBeD4B3bGeQBx0xdITXJv02QldbA6UFCw-6FNbzDSToe2G316CzOuzoED3-Iwdi9FIqWwj7vPvEiUEFmCYAGVuWAbmxmJClECoLlkkYIs5QLRXLHV_wDmmkULYDlmgLdsNU3fQiyQxog9lVS33I9E8Ueg34E6cvMYXFx9hUNchK6fYj-M8XMYeE9tcHUX58djt5Q5DIfpjt34uptoc841q4qXavvGy_fX3TYvebBi5hKy2reN0A0B-lSoRnrjndRagEbQ3rWpa8FptNhobaBxqfKICpyHWhOs2cOJDUS0P46hr8ef_fkH-ANNgkxt</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Lead-free Piezoelectric Thin Films for Bio-medical Applications</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Seung-Hyun Kim ; Koo, C.Y. ; Cheon, J.-H. ; Yeom, J.-H. ; Woo, H.-J. ; Ha, J.</creator><creatorcontrib>Seung-Hyun Kim ; Koo, C.Y. ; Cheon, J.-H. ; Yeom, J.-H. ; Woo, H.-J. ; Ha, J.</creatorcontrib><description>A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based piezoelectric thin films due to their reasonably good piezoelectric properties even if overall properties are somewhat worse than those of PZT based piezoelectrics. These results indicate that NKN films might be a promising lead-free piezoelectric system for a wide range of bio-compatible MEMS applications.</description><identifier>ISSN: 1099-4734</identifier><identifier>ISBN: 1424413338</identifier><identifier>ISBN: 9781424413331</identifier><identifier>EISSN: 2375-0448</identifier><identifier>EISBN: 9781424413348</identifier><identifier>EISBN: 1424413346</identifier><identifier>DOI: 10.1109/ISAF.2007.4393428</identifier><language>eng</language><publisher>IEEE</publisher><subject>Chemicals ; Dielectric substrates ; Dielectric thin films ; Environmentally friendly manufacturing techniques ; Ferroelectric films ; Micromechanical devices ; Piezoelectric films ; Scanning electron microscopy ; Semiconductor films ; X-ray scattering</subject><ispartof>2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics, 2007, p.858-860</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4393428$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27902,54530,54895,54907</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4393428$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Seung-Hyun Kim</creatorcontrib><creatorcontrib>Koo, C.Y.</creatorcontrib><creatorcontrib>Cheon, J.-H.</creatorcontrib><creatorcontrib>Yeom, J.-H.</creatorcontrib><creatorcontrib>Woo, H.-J.</creatorcontrib><creatorcontrib>Ha, J.</creatorcontrib><title>Lead-free Piezoelectric Thin Films for Bio-medical Applications</title><title>2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics</title><addtitle>ISAF</addtitle><description>A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based piezoelectric thin films due to their reasonably good piezoelectric properties even if overall properties are somewhat worse than those of PZT based piezoelectrics. These results indicate that NKN films might be a promising lead-free piezoelectric system for a wide range of bio-compatible MEMS applications.</description><subject>Chemicals</subject><subject>Dielectric substrates</subject><subject>Dielectric thin films</subject><subject>Environmentally friendly manufacturing techniques</subject><subject>Ferroelectric films</subject><subject>Micromechanical devices</subject><subject>Piezoelectric films</subject><subject>Scanning electron microscopy</subject><subject>Semiconductor films</subject><subject>X-ray scattering</subject><issn>1099-4734</issn><issn>2375-0448</issn><isbn>1424413338</isbn><isbn>9781424413331</isbn><isbn>9781424413348</isbn><isbn>1424413346</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2007</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><recordid>eNo10M1KxDAUBeD4B3bGeQBx0xdITXJv02QldbA6UFCw-6FNbzDSToe2G316CzOuzoED3-Iwdi9FIqWwj7vPvEiUEFmCYAGVuWAbmxmJClECoLlkkYIs5QLRXLHV_wDmmkULYDlmgLdsNU3fQiyQxog9lVS33I9E8Ueg34E6cvMYXFx9hUNchK6fYj-M8XMYeE9tcHUX58djt5Q5DIfpjt34uptoc841q4qXavvGy_fX3TYvebBi5hKy2reN0A0B-lSoRnrjndRagEbQ3rWpa8FptNhobaBxqfKICpyHWhOs2cOJDUS0P46hr8ef_fkH-ANNgkxt</recordid><startdate>200705</startdate><enddate>200705</enddate><creator>Seung-Hyun Kim</creator><creator>Koo, C.Y.</creator><creator>Cheon, J.-H.</creator><creator>Yeom, J.-H.</creator><creator>Woo, H.-J.</creator><creator>Ha, J.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200705</creationdate><title>Lead-free Piezoelectric Thin Films for Bio-medical Applications</title><author>Seung-Hyun Kim ; Koo, C.Y. ; Cheon, J.-H. ; Yeom, J.-H. ; Woo, H.-J. ; Ha, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-137afdb06be34f502b1f8fc166036436fcd5cd3c6494b6683bc52f4423cf3a6e3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Chemicals</topic><topic>Dielectric substrates</topic><topic>Dielectric thin films</topic><topic>Environmentally friendly manufacturing techniques</topic><topic>Ferroelectric films</topic><topic>Micromechanical devices</topic><topic>Piezoelectric films</topic><topic>Scanning electron microscopy</topic><topic>Semiconductor films</topic><topic>X-ray scattering</topic><toplevel>online_resources</toplevel><creatorcontrib>Seung-Hyun Kim</creatorcontrib><creatorcontrib>Koo, C.Y.</creatorcontrib><creatorcontrib>Cheon, J.-H.</creatorcontrib><creatorcontrib>Yeom, J.-H.</creatorcontrib><creatorcontrib>Woo, H.-J.</creatorcontrib><creatorcontrib>Ha, J.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE/IET Electronic Library</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Seung-Hyun Kim</au><au>Koo, C.Y.</au><au>Cheon, J.-H.</au><au>Yeom, J.-H.</au><au>Woo, H.-J.</au><au>Ha, J.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Lead-free Piezoelectric Thin Films for Bio-medical Applications</atitle><btitle>2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics</btitle><stitle>ISAF</stitle><date>2007-05</date><risdate>2007</risdate><spage>858</spage><epage>860</epage><pages>858-860</pages><issn>1099-4734</issn><eissn>2375-0448</eissn><isbn>1424413338</isbn><isbn>9781424413331</isbn><eisbn>9781424413348</eisbn><eisbn>1424413346</eisbn><abstract>A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based piezoelectric thin films due to their reasonably good piezoelectric properties even if overall properties are somewhat worse than those of PZT based piezoelectrics. These results indicate that NKN films might be a promising lead-free piezoelectric system for a wide range of bio-compatible MEMS applications.</abstract><pub>IEEE</pub><doi>10.1109/ISAF.2007.4393428</doi><tpages>3</tpages></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 1099-4734
ispartof 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics, 2007, p.858-860
issn 1099-4734
2375-0448
language eng
recordid cdi_ieee_primary_4393428
source IEEE Electronic Library (IEL) Conference Proceedings
subjects Chemicals
Dielectric substrates
Dielectric thin films
Environmentally friendly manufacturing techniques
Ferroelectric films
Micromechanical devices
Piezoelectric films
Scanning electron microscopy
Semiconductor films
X-ray scattering
title Lead-free Piezoelectric Thin Films for Bio-medical Applications
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-28T13%3A56%3A39IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Lead-free%20Piezoelectric%20Thin%20Films%20for%20Bio-medical%20Applications&rft.btitle=2007%20Sixteenth%20IEEE%20International%20Symposium%20on%20the%20Applications%20of%20Ferroelectrics&rft.au=Seung-Hyun%20Kim&rft.date=2007-05&rft.spage=858&rft.epage=860&rft.pages=858-860&rft.issn=1099-4734&rft.eissn=2375-0448&rft.isbn=1424413338&rft.isbn_list=9781424413331&rft_id=info:doi/10.1109/ISAF.2007.4393428&rft.eisbn=9781424413348&rft.eisbn_list=1424413346&rft_dat=%3Cieee_6IE%3E4393428%3C/ieee_6IE%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-i90t-137afdb06be34f502b1f8fc166036436fcd5cd3c6494b6683bc52f4423cf3a6e3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=4393428&rfr_iscdi=true