Integrated ZnO Surface Acoustic Wave Microfluidic and Biosensor System

This paper presents the development of a novel portable cancer diagnostic system, based on thin film ZnO surface acoustic wave device, with integrated functions of microfluidic transport, mixing and bio-detection devices. The device is easily integrated with electronic control circuitry and fabricat...

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Main Authors: Lee, D.S., Fu, Y.Q., Maeng, S., Du, X.Y., Tan, S.C., Luo, J.K., Flewitt, A.J., Kim, S.H., Park, N.M., Choi, Y.J., Yoon, H.C., Oh, S.Y., Milne, W.I.
Format: Conference Proceeding
Language:English
Subjects:
Acoustic waves
Biosensors
Cancer
Microfluidics
Polymer films
Surface acoustic wave devices
Surface acoustic waves
Thin film circuits
Thin film devices
Zinc oxide
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creator Lee, D.S.
Fu, Y.Q.
Maeng, S.
Du, X.Y.
Tan, S.C.
Luo, J.K.
Flewitt, A.J.
Kim, S.H.
Park, N.M.
Choi, Y.J.
Yoon, H.C.
Oh, S.Y.
Milne, W.I.
description This paper presents the development of a novel portable cancer diagnostic system, based on thin film ZnO surface acoustic wave device, with integrated functions of microfluidic transport, mixing and bio-detection devices. The device is easily integrated with electronic control circuitry and fabricated with low temperature on Si, glass or even polymer substrates. Such a system is targeted at both the consumer market for self-diagnosis and the professional healthcare market for real-time diagnosis in a hospital and clinic environment.
doi_str_mv 10.1109/IEDM.2007.4419082
format conference_proceeding
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ispartof 2007 IEEE International Electron Devices Meeting, 2007, p.851-854
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source IEEE Xplore All Conference Series
subjects Acoustic waves
Biosensors
Cancer
Microfluidics
Polymer films
Surface acoustic wave devices
Surface acoustic waves
Thin film circuits
Thin film devices
Zinc oxide
title Integrated ZnO Surface Acoustic Wave Microfluidic and Biosensor System
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