Electrothermal microgripper with large jaw displacement and integrated force sensors

This paper presents a novel sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force sensing cantilever beams which can monitor the displacement of the microgripper jaws and also the contact force between the tips and the gripped object. A jaw motion up to 32 m...

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Bibliographic Details
Main Authors: Chu Duc, T., Lau, G.K., Creemer, J.F., Sarro, P.M.
Format: Conference Proceeding
Language:English
Subjects:
Actuators
Electrothermal effects
Energy consumption
Force sensors
Grippers
Monitoring
Piezoresistance
Power measurement
Structural beams
Voltage
Online Access:Request full text
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Summary:This paper presents a novel sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force sensing cantilever beams which can monitor the displacement of the microgripper jaws and also the contact force between the tips and the gripped object. A jaw motion up to 32 mum with an output sensing voltage of 49 mV and 114 mW power consumption is measured at a driving voltage of 4.5 V. The working temperature of the structure is then 177degC. The force sensitivity is 1.7 V/N and the corresponding displacement sensitivity is 1.5 kV/m. A minimum detectable displacement and a minimum detectable force of 1 nm and 770 nN are estimated, respectively.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2008.4443707