Reconfigurable filters using mems resonators and integrated optical microcavities

An in-plane silicon-on-insulator (SOI) MEMS-tunable Fabry-Perot microcavity filter is presented, in which one distributed Bragg reflector (DBR) mirror is attached to a doubly-clamped suspended beam resonator. We improve upon previous designs by utilizing a silicon waveguide cavity instead of an air...

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Bibliographic Details
Main Authors: Pruessner, M.W., Stievater, T.H., Rabinovich, W.S.
Format: Conference Proceeding
Language:English
Subjects:
Distributed Bragg reflectors
Fabry-Perot
Integrated optics
Microcavities
Mirrors
Optical filters
Optical resonators
Optical sensors
Optical waveguides
Resonator filters
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Description
Summary:An in-plane silicon-on-insulator (SOI) MEMS-tunable Fabry-Perot microcavity filter is presented, in which one distributed Bragg reflector (DBR) mirror is attached to a doubly-clamped suspended beam resonator. We improve upon previous designs by utilizing a silicon waveguide cavity instead of an air cavity. The design eliminates a significant source of optical loss (beam divergence) leading to improved mirror bandwidth (>150nm) and Q-factor Q Optical ap4,200). By keeping one DBR mirror fixed and displacing the second mirror, we change the effective cavity length and modify the Fabry-Perot resonances. Tuning over Deltalambdaap10 nm is measured using in-plane electrostatic actuation to displace the DBR. The application of the device as a sensor is also discussed.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2008.4443769