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High-aspect-ratio vertical surface profiler using sensitive displacement detection by optomecanical probe
This paper proposes an optomechanical surface profiler for high aspect ratio vertical walls. The profiler consists of a bulk silicon micro cantilever probe with a vertical mirror at its end and an integrated sheath fiberguide to insert thinned optical fiber, all fabricated by deep reactive ion etchi...
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creator | Hamaguchi, Y. Kubota, M. Pourciel, J.-B. Mita, Y. |
description | This paper proposes an optomechanical surface profiler for high aspect ratio vertical walls. The profiler consists of a bulk silicon micro cantilever probe with a vertical mirror at its end and an integrated sheath fiberguide to insert thinned optical fiber, all fabricated by deep reactive ion etching (DRIE). The probe reflects light by integrated vertical mirror and detects the surface contact point by measuring light power attenuation, which decreases according to the overdrive distance from the contact point. A new stair-shape vertical mirror showed a high (-7.3 dBm/mum) power-to-overdrive sensitivity at 3.5 mum overdriving displacement. Together with an original neck-pinched cantilever design, the proposed profiler showed a potential superiority to conventional piezoresistive detection method and applicability to narrower entrance high aspect ratio structures. |
doi_str_mv | 10.1109/MEMSYS.2008.4443798 |
format | conference_proceeding |
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The profiler consists of a bulk silicon micro cantilever probe with a vertical mirror at its end and an integrated sheath fiberguide to insert thinned optical fiber, all fabricated by deep reactive ion etching (DRIE). The probe reflects light by integrated vertical mirror and detects the surface contact point by measuring light power attenuation, which decreases according to the overdrive distance from the contact point. A new stair-shape vertical mirror showed a high (-7.3 dBm/mum) power-to-overdrive sensitivity at 3.5 mum overdriving displacement. Together with an original neck-pinched cantilever design, the proposed profiler showed a potential superiority to conventional piezoresistive detection method and applicability to narrower entrance high aspect ratio structures.</description><identifier>ISSN: 1084-6999</identifier><identifier>ISBN: 9781424417926</identifier><identifier>ISBN: 1424417929</identifier><identifier>EISBN: 9781424417933</identifier><identifier>EISBN: 1424417937</identifier><identifier>DOI: 10.1109/MEMSYS.2008.4443798</identifier><language>eng</language><publisher>IEEE</publisher><subject>Atom optics ; High speed optical techniques ; Mirrors ; Optical detectors ; Optical fibers ; Optical sensors ; Piezoresistance ; Probes ; Sensor phenomena and characterization ; Silicon</subject><ispartof>2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008, p.884-887</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4443798$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4443798$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Hamaguchi, Y.</creatorcontrib><creatorcontrib>Kubota, M.</creatorcontrib><creatorcontrib>Pourciel, J.-B.</creatorcontrib><creatorcontrib>Mita, Y.</creatorcontrib><title>High-aspect-ratio vertical surface profiler using sensitive displacement detection by optomecanical probe</title><title>2008 IEEE 21st International Conference on Micro Electro Mechanical Systems</title><addtitle>MEMSYS</addtitle><description>This paper proposes an optomechanical surface profiler for high aspect ratio vertical walls. The profiler consists of a bulk silicon micro cantilever probe with a vertical mirror at its end and an integrated sheath fiberguide to insert thinned optical fiber, all fabricated by deep reactive ion etching (DRIE). The probe reflects light by integrated vertical mirror and detects the surface contact point by measuring light power attenuation, which decreases according to the overdrive distance from the contact point. A new stair-shape vertical mirror showed a high (-7.3 dBm/mum) power-to-overdrive sensitivity at 3.5 mum overdriving displacement. Together with an original neck-pinched cantilever design, the proposed profiler showed a potential superiority to conventional piezoresistive detection method and applicability to narrower entrance high aspect ratio structures.</description><subject>Atom optics</subject><subject>High speed optical techniques</subject><subject>Mirrors</subject><subject>Optical detectors</subject><subject>Optical fibers</subject><subject>Optical sensors</subject><subject>Piezoresistance</subject><subject>Probes</subject><subject>Sensor phenomena and characterization</subject><subject>Silicon</subject><issn>1084-6999</issn><isbn>9781424417926</isbn><isbn>1424417929</isbn><isbn>9781424417933</isbn><isbn>1424417937</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2008</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><recordid>eNpV0M1OAjEUBeAaNRGRJ2DTFxjs37TTpSEoJhAX6MIVudO5xZphZtIWEt5eomxcnZzk5FscQqaczThn9nG9WG8-NzPBWDVTSkljqysysabiSijFjZXy-l8X-oaMOKtUoa21d-Q-pW_GBOPKjkhYht1XAWlAl4sIOfT0iDEHBy1Nh-jBIR1i70OLkR5S6HY0YZdCDkekTUhDe17sscu0wXw2Qt_R-kT7Ifd7dND9Qmegxgdy66FNOLnkmHw8L97ny2L19vI6f1oVgZsyFyBKDV7UCjVwJqUxVgPWkqNl0FS-AcGkLhvPXW28M7UTqJkuFXjTOKHlmEz_3ICI2yGGPcTT9vKU_AGKVF5I</recordid><startdate>200801</startdate><enddate>200801</enddate><creator>Hamaguchi, Y.</creator><creator>Kubota, M.</creator><creator>Pourciel, J.-B.</creator><creator>Mita, Y.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200801</creationdate><title>High-aspect-ratio vertical surface profiler using sensitive displacement detection by optomecanical probe</title><author>Hamaguchi, Y. ; Kubota, M. ; Pourciel, J.-B. ; Mita, Y.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-a256af2b4e6a10337796aeb31e90ad8fda20365df1cb7fc7bc2e60654af7dc263</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Atom optics</topic><topic>High speed optical techniques</topic><topic>Mirrors</topic><topic>Optical detectors</topic><topic>Optical fibers</topic><topic>Optical sensors</topic><topic>Piezoresistance</topic><topic>Probes</topic><topic>Sensor phenomena and characterization</topic><topic>Silicon</topic><toplevel>online_resources</toplevel><creatorcontrib>Hamaguchi, Y.</creatorcontrib><creatorcontrib>Kubota, M.</creatorcontrib><creatorcontrib>Pourciel, J.-B.</creatorcontrib><creatorcontrib>Mita, Y.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Xplore</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Hamaguchi, Y.</au><au>Kubota, M.</au><au>Pourciel, J.-B.</au><au>Mita, Y.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>High-aspect-ratio vertical surface profiler using sensitive displacement detection by optomecanical probe</atitle><btitle>2008 IEEE 21st International Conference on Micro Electro Mechanical Systems</btitle><stitle>MEMSYS</stitle><date>2008-01</date><risdate>2008</risdate><spage>884</spage><epage>887</epage><pages>884-887</pages><issn>1084-6999</issn><isbn>9781424417926</isbn><isbn>1424417929</isbn><eisbn>9781424417933</eisbn><eisbn>1424417937</eisbn><abstract>This paper proposes an optomechanical surface profiler for high aspect ratio vertical walls. The profiler consists of a bulk silicon micro cantilever probe with a vertical mirror at its end and an integrated sheath fiberguide to insert thinned optical fiber, all fabricated by deep reactive ion etching (DRIE). The probe reflects light by integrated vertical mirror and detects the surface contact point by measuring light power attenuation, which decreases according to the overdrive distance from the contact point. A new stair-shape vertical mirror showed a high (-7.3 dBm/mum) power-to-overdrive sensitivity at 3.5 mum overdriving displacement. Together with an original neck-pinched cantilever design, the proposed profiler showed a potential superiority to conventional piezoresistive detection method and applicability to narrower entrance high aspect ratio structures.</abstract><pub>IEEE</pub><doi>10.1109/MEMSYS.2008.4443798</doi><tpages>4</tpages></addata></record> |
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identifier | ISSN: 1084-6999 |
ispartof | 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008, p.884-887 |
issn | 1084-6999 |
language | eng |
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source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Atom optics High speed optical techniques Mirrors Optical detectors Optical fibers Optical sensors Piezoresistance Probes Sensor phenomena and characterization Silicon |
title | High-aspect-ratio vertical surface profiler using sensitive displacement detection by optomecanical probe |
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