Micromachined Quantum-Well Air-Clad Waveguides

We have used surface micromachining to fabricate suspended InGaAs quantum well waveguides that are supported by lateral tethers. Their enhanced electro-optical and nonlinear-optical properties will be discussed.

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Bibliographic Details
Main Authors: Stievater, T.H., Rabinovich, W.S., Park, D.
Format: Conference Proceeding
Language:English
Subjects:
Nonlinear optics
Optical devices
Optical sensors
Optical surface waves
Optical waveguides
Propagation losses
Quantum well devices
Quantum wells
Semiconductor waveguides
Wavelength measurement
Online Access:Request full text
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Description
Summary:We have used surface micromachining to fabricate suspended InGaAs quantum well waveguides that are supported by lateral tethers. Their enhanced electro-optical and nonlinear-optical properties will be discussed.
ISSN:2160-9004
DOI:10.1109/CLEO.2007.4452790