In-situ Pulse Characterization for Silicon Micromachining

Femtosecond pulse characterization and adaptive pulse compression is demonstrated using surface second harmonic generation from a silicon wafer using multiphoton intrapulse interference phase scan (MIIPS).

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Bibliographic Details
Main Authors: Xin Zhu, Gunaratne, T.C., Dantus, M.
Format: Conference Proceeding
Language:English
Subjects:
Micromachining
Nonlinear optics
Optical harmonic generation
Optical pulse generation
Optical pulse shaping
Pulse amplifiers
Pulse compression methods
Pulse shaping methods
Silicon
Ultrafast optics
Online Access:Request full text
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Description
Summary:Femtosecond pulse characterization and adaptive pulse compression is demonstrated using surface second harmonic generation from a silicon wafer using multiphoton intrapulse interference phase scan (MIIPS).
ISSN:2160-9004
DOI:10.1109/CLEO.2007.4453394