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Advanced femtosecond lasers in Manufacturing

We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor and LCD manufacturing factory.

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Bibliographic Details
Main Authors: Sekita, H., Imahoko, T., Takasago, K., Kamata, M., Tsujikawa, S., Sumiyoshi, T.
Format: Conference Proceeding
Language:English
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Online Access:Request full text
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Description
Summary:We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor and LCD manufacturing factory.
ISSN:2160-9004
DOI:10.1109/CLEO.2007.4453751