Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1-8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when th...

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Bibliographic Details
Main Authors: Tiggelman, M.P.J., Reimann, K., Liu, J., Klee, M., Keur, W., Mauczock, R., Schmitz, J., Hueting, R.J.E.
Format: Conference Proceeding
Language:English
Subjects:
Capacitance measurement
Capacitors
Dielectric losses
Electrodes
Ferroelectric materials
Parasitic capacitance
Probes
Radio frequency
Radiofrequency identification
Semiconductor device testing
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Description
Summary:A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1-8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.
ISSN:1071-9032
2158-1029
DOI:10.1109/ICMTS.2008.4509337