Pursuing the Increase of Factory Automation in 200mm Frontend Manufacturing to Manage the Changes Imposed by the Transitionfrom High-Volume Low-Mix to High-Mix Low-Volume Production

We regard the stringent adoption of factory automation as the right strategy to efficiently leverage a 200 mm fab's competitiveness. In this article we exemplarily show how the Dresden fab cut its own path in the face of the transition challenge from a high-volume low-mix fab to a high-mix low-...

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Bibliographic Details
Main Authors: Heinrich, H., Schneider, G., Heinlein, F., Keil, S., Deutschlander, A., Lasch, R.
Format: Conference Proceeding
Language:English
Subjects:
Automated material handling system (AMHS)
Automatic control
Control systems
conveyor
cost efficiency
Costs
cycle time (CT)
Environmental economics
factory automation
head count efficiency
key performance indi-cator
layout
Logic
manufacturing
Manufacturing automation
Production
quality
Semiconductor device manufacture
Technology management
Transportation
utilization
variability
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Summary:We regard the stringent adoption of factory automation as the right strategy to efficiently leverage a 200 mm fab's competitiveness. In this article we exemplarily show how the Dresden fab cut its own path in the face of the transition challenge from a high-volume low-mix fab to a high-mix low-volume fab. We discuss the advantages of our conveyor type transport system with respect to our automation strategy and its extendibility to direct tool loading. A comparison of our transport system with typical 300 mm performance data and current ITRS requirements [1] is presented. We describe the positive influence of the taken factory automation measures on typical key manufacturing indicators like cycle time, tool utilization, head count efficiency, variability improvement, cost efficiency and quality.
ISSN:1078-8743
2376-6697
DOI:10.1109/ASMC.2008.4529020