Passivity-Based Stabilization of a 1-DOF Electrostatic MEMS Model With a Parasitic Capacitance

Feedback control of electrostatic microelectromechanical systems (MEMS) is significantly complicated by the presence of parasitics. This paper considers the stabilization of a one-degree-of-freedom (1-DOF) piston actuator under the influence of a capacitively coupled parasitic electrode. Previous wo...

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Bibliographic Details
Published in:IEEE transactions on control systems technology 2009-01, Vol.17 (1), p.249-256
Main Authors: Wickramasinghe, I.P.M., Maithripala, D.H.S., Kawade, B.D., Berg, J.M., Dayawansa, W.P.
Format: Article
Language:English
Subjects:
Actuators
Applied sciences
Asymptotic properties
Bifurcation
Charge
charge pull-in
control
Control systems
Controllers
Dynamics
Electrodes
Electronics
electrostatic
Electrostatics
Exact sciences and technology
Feedback control
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectromechanical systems
microelectromechanical systems (MEMS)
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices
Micromechanical devices and systems
Parasitic capacitance
parasitics
passivity
Physics
Pistons
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Stabilization
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Summary:Feedback control of electrostatic microelectromechanical systems (MEMS) is significantly complicated by the presence of parasitics. This paper considers the stabilization of a one-degree-of-freedom (1-DOF) piston actuator under the influence of a capacitively coupled parasitic electrode. Previous work by the authors has shown that, in the absence of parasitics, passivity-based control may be used to make any feasible equilibrium point of this system globally asymptotically stable. However parasitics may destabilize the nominal closed-loop system by inducing multiple equilibrium points, causing a saddle-node bifurcation called charge pull-in . This note shows how the nominal passivity-based control formulation may be modified to eliminate the multiple equilibria and prevent charge pull-in. As in previous work, we consider both static and dynamic output feedback controllers, with the dynamic controller providing additional control over transient performance.
ISSN:1063-6536
1558-0865
DOI:10.1109/TCST.2008.924571