MEMS Fabrication Course for Pressure Sensors, Flow Sensors, Fluidic Channels and Micro-Pumps

This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication a...

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Bibliographic Details
Main Authors: Pearson, R.E., Fuller, L.F., Puchades, I.
Format: Conference Proceeding
Language:English
Online Access:Request full text
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Summary:This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for pressure sensors, flow sensors, micro-pumps, and micro- fluidic packaging in a ten week fabrication course are reported.
ISSN:0749-6877
2375-5350
DOI:10.1109/UGIM.2008.26