Measurements of the electrical to VUV conversion efficiency in a xenon dielectric barrier discharge lamp by oxygen actinometry

Within the plasma of high-pressure Xe 2 * excimer lamps, measurements of the intrinsic efficiency for the conversion of electrical input power into lambda~172nm output are notoriously difficult to undertake experimentally. In particular, the spatially integrated VUV output is difficult to determine...

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Bibliographic Details
Main Authors: Carman, R.J., Kane, D.M., Ward, B.K.
Format: Conference Proceeding
Language:English
Subjects:
Atmospheric measurements
Dielectric measurements
Photonics
Plasma measurements
Plasmas
Power measurement
Production
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Summary:Within the plasma of high-pressure Xe 2 * excimer lamps, measurements of the intrinsic efficiency for the conversion of electrical input power into lambda~172nm output are notoriously difficult to undertake experimentally. In particular, the spatially integrated VUV output is difficult to determine with reasonable accuracy. Direct measurements of the far-field VUV irradiance from the lamp require either evacuated or inert-gas filled photon propagation paths to prevent photo- absorption by O 2 that occurs for lambda< 190nm 1 . However, by using controlled flows of pure oxygen through an external cell surrounding the lamp, the total VUV output power may be measured by means of O 2 actinometry. In this paper, a medium-scale Xenon excimer lamp was fabricated using Suprasil 310 fused-silica tubing fitted with VUV transmitting fine metal mesh electrodes to allow the VUV photons to exit the plasma region with minimal attenuation. The performance of the Xenon excimer lamp was investigated using electrical excitation from custom-built high-voltage pulsed power supplies with fast pulse slew rates (
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.2008.4590909