Sputtered tellurite glass thin films for planar optical devices

Tellurium oxide is a promising optical material, conjugating transparency in the infrared with high refractive index, low chromatic dispersion with strong nonlinear response, elevated acousto-optic figure of merit and rare earth doping capability. Reactive sputtering is a suitable technique to obtai...

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Bibliographic Details
Main Authors: Lanata, M., Fere, M., Piccinin, D., Pietralunga, S.M., Martinelli, M.
Format: Conference Proceeding
Language:English
Subjects:
Fiber optics
Glass
Nonlinear optics
Optical amplifiers
Optical fibers
Optical films
planar lightwave circuits
reactive ion etching
reactive sputtering
tellurite glasses
tellurium oxide films
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Summary:Tellurium oxide is a promising optical material, conjugating transparency in the infrared with high refractive index, low chromatic dispersion with strong nonlinear response, elevated acousto-optic figure of merit and rare earth doping capability. Reactive sputtering is a suitable technique to obtain thin films of pure TeO 2 glass, with tunable stoichiometry, without the need for added components to help vitrification. We report on the growth of tellurite thin films, on the linear and non-linear optical characterization and on the process technology to implement high-contrast planar optics.
ISSN:2162-7339
DOI:10.1109/ICTON.2008.4598696