Towards integration of glass microlens with silicon comb-drive X-Y microstage

We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.

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Bibliographic Details
Main Authors: Laszczyk, Karolina, Bargiel, Sylwester, Gorecki, Christophe, Krezel, Jerzy
Format: Conference Proceeding
Language:English
Subjects:
Bonding
Fabrication
Glass
Lenses
Microoptics
Optical device fabrication
Silicon
Online Access:Request full text
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Description
Summary:We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.
ISSN:2160-5033
DOI:10.1109/OMEMS.2008.4607882