On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer

Microoptics is a fertile area for hybrid assembly of miniaturized components, due to the need to integrate different optical and actuation materials in a single precision bench. In this paper we discuss issues related to the assembly and alignment of a microspectrometer using 3D miniature non-silico...

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Bibliographic Details
Main Authors: Das, A.N., Jeongsik Sin, Popa, D.O., Stephanou, H.E.
Format: Conference Proceeding
Language:English
Subjects:
Automation
Bridges
Conferences
USA Councils
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Summary:Microoptics is a fertile area for hybrid assembly of miniaturized components, due to the need to integrate different optical and actuation materials in a single precision bench. In this paper we discuss issues related to the assembly and alignment of a microspectrometer using 3D miniature non-silicon objects such as glass lenses, optical fibers, laser sources, and detectors onto silicon fixtures and microactuators. The resulting instrument, a fiber-coupled MOEMS spectrometer, requires high alignment precision, because it is based on interference fringes from a Michelson Interferometer bench. Our fiber-coupled Fourier-Transform microspectrometer has a nominal packaged size of 3 cm times 3 cm times 3 cm, and targets wavelengths in the visible and NIR spectra. We use modular microscale parts, including minimum energy compliant MEMS fasteners to configure a die-sized (1 cm times 1 cm times 0.5 cm) microoptical bench. We discuss the tolerance of this complex assembly, and present experimental results validating the automated assembly and alignment of the optical components on the microbench.
ISSN:2161-8070
2161-8089
DOI:10.1109/COASE.2008.4626541