Miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes and SiO2 film

Currently, miniature surface acoustic wave (SAW) devices (filters and duplexers) with a good temperature stability are strongly required. In order to realize its requirement, various SAW substrates combining a high density metal electrode, a SiO 2 film, and LiTaO 3 or LiNbO 3 substrate were research...

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Bibliographic Details
Main Authors: Michio Kadota, Takeshi Nakao, Kenji Nishiyama, Shunsuke Kido, Masanori Kato, Ryoichi Omote, Hiroshi Yonekura, Norihiko Takada, Ryoichi Kita, Yasuharu Nakai, Daisuke Yamamoto
Format: Conference Proceeding
Language:English
Subjects:
Copper
Couplings
Electrodes
Resonant frequency
Substrates
Surface acoustic waves
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Summary:Currently, miniature surface acoustic wave (SAW) devices (filters and duplexers) with a good temperature stability are strongly required. In order to realize its requirement, various SAW substrates combining a high density metal electrode, a SiO 2 film, and LiTaO 3 or LiNbO 3 substrate were researched. Their combinations offer excellent properties such as large electrode reflection coefficient, large mechanical coupling factor, low velocity, and good temperature stability. This paper reviews realization of miniature SAW devices with low insertion loss and good temperature stability, such as SAW duplexers for personal communication service system in the United States (US-PCS) and wide band code division multiple access system (W-CDMA) using thier combinatios.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2008.4632965