Waveguide coupled Ge-on-oxide photodetectors for integrated optical links

We demonstrate Ge MSM photodetectors with responsivities of 0.9 A/W at 1310 nm and capable of data rates of 20 Gb/s. Direct Ge on oxide deposition makes these photodetectors potentially suitable for CMOS back-end optical links.

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Bibliographic Details
Main Authors: Reshotko, M.R., Block, B.A., Ben Jin, Chang, P.
Format: Conference Proceeding
Language:English
Subjects:
CMOS integrated circuits
Materials
Optical waveguides
Photodetectors
Planar waveguides
Silicon
Substrates
Online Access:Request full text
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Description
Summary:We demonstrate Ge MSM photodetectors with responsivities of 0.9 A/W at 1310 nm and capable of data rates of 20 Gb/s. Direct Ge on oxide deposition makes these photodetectors potentially suitable for CMOS back-end optical links.
ISSN:1949-2081
1949-209X
DOI:10.1109/GROUP4.2008.4638138