Poly(Dimethylsiloxane) Waveguide Cantilevers for Optomechanical Sensing

The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Young's modulus of this material relax...

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Bibliographic Details
Published in:IEEE photonics technology letters 2009-01, Vol.21 (2), p.79-81
Main Authors: Llobera, A., Cadarso, V.J., Zinoviev, K., Dominguez, C., Buttgenbach, S., Vila, J., Plaza, J.A., Biittgenbach, S.
Format: Article
Language:English
Subjects:
Droplets
Ethyl alcohol
Evaporation
Integrated optics
Light emitting diodes
Lithography
Microoptoelectromechanical systems (MOEMS)
microsensors
Monolithic integrated circuits
Noise levels
Numerical simulation
Optical materials
optical polymers
Optical properties
Optical sensors
Optical waveguides
plastics
Resonant frequencies
Resonant frequency
Silicon
Silicone resins
Soft lithography
waveguides
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Summary:The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Young's modulus of this material relaxes the dimensions' requirements, being then possible to define thick PDMS structures with a sensitivity comparable to nanometer scale silicon counterparts. Experimental results using a light-emitting diode working at 670 nm have determined the resonant frequencies of the proposed MOEMS and are in agreement with the numerical simulations done. Finally, when a 2-mu L droplet of ethanol (1.58 mg) is dispensed on the cantilever, relative losses rise to 25 dB, returning to its initial value when the droplet evaporates.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2008.2008659