Linear microvibromotor for positioning optical components

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Bibliographic Details
Main Authors: Daneman, M.J., Tien, N.C., Solgaard, O., Pisano, A.P., Lau, K.Y., Muller, R.S.
Format: Conference Proceeding
Language:English
Subjects:
Actuators
Electrostatics
Flanges
Micromachining
Optical devices
Q factor
Resonance
Sensor phenomena and characterization
Velocity control
Voltage
Online Access:Request full text
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DOI:10.1109/MEMSYS.1995.472554