The fine patterning of diamond thin film

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Bibliographic Details
Main Authors: Mao, M.Y., Wang, T.P., Xie, J.F., Wang, W.Y.
Format: Conference Proceeding
Language:English
Subjects:
Chemicals
Conductivity
Doping
Etching
Fabrication
Feeds
Micromotors
Silicon
Substrates
Transistors
Online Access:Request full text
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DOI:10.1109/MEMSYS.1995.472565