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The fine patterning of diamond thin film
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| Format: | Conference Proceeding |
| Language: | English |
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| creator | Mao, M.Y. Wang, T.P. Xie, J.F. Wang, W.Y. |
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| doi_str_mv | 10.1109/MEMSYS.1995.472565 |
| format | conference_proceeding |
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| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 9780780325036 |
| ispartof | Proceedings IEEE Micro Electro Mechanical Systems. 1995, 1995, p.392 |
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| language | eng |
| recordid | cdi_ieee_primary_472565 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Chemicals Conductivity Doping Etching Fabrication Feeds Micromotors Silicon Substrates Transistors |
| title | The fine patterning of diamond thin film |
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