Device fabrication scheme for evaporated SPC poly-Si thin-film solar cells on glass (EVA)

Polycrystalline silicon thin-film solar cells on glass obtained by solid phase crystallisation (SPC) of PECVD-deposited a-Si have good photovoltaic efficiency. In this paper we present a functioning device fabrication scheme for equivalent solar cells made from evaporated SPC poly-Si films (EVA). Re...

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Bibliographic Details
Main Authors: Kunz, O., Zi Ouyang, Wong, J., Aberle, A.G.
Format: Conference Proceeding
Language:English
Subjects:
Crystallization
device fabrication
Fabrication
Glass
metallisation
Photovoltaic cells
Photovoltaic systems
poly-silicon
Semiconductor thin films
shunting
Silicon
Solar power generation
Solids
Thin film devices
thin-film solar cells
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Summary:Polycrystalline silicon thin-film solar cells on glass obtained by solid phase crystallisation (SPC) of PECVD-deposited a-Si have good photovoltaic efficiency. In this paper we present a functioning device fabrication scheme for equivalent solar cells made from evaporated SPC poly-Si films (EVA). Respectable efficiencies of above 4% are achieved for both p-type and n-type EVA solar cells on planar glass superstrates. The various hurdles that had to be passed to achieve these results are described.
ISSN:1097-2137
2377-5505
DOI:10.1109/COMMAD.2008.4802149