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Large Qxf product for HBAR using Smart Cut ™ transfer of LiNbO3 thin layers onto LiNbO3 substrate
In this paper, we propose a novel approach for HBAR devices using the Smart Cuttrade technology to obtain thin homogeneous X-cut single crystal films of LiNbO 3 . Sub-micron layers were successfully transferred onto LiNbO 3 handle wafers. RF characterizations were performed around 1.95 GHz and quali...
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Main Authors: | , , , , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | In this paper, we propose a novel approach for HBAR devices using the Smart Cuttrade technology to obtain thin homogeneous X-cut single crystal films of LiNbO 3 . Sub-micron layers were successfully transferred onto LiNbO 3 handle wafers. RF characterizations were performed around 1.95 GHz and quality factors in excess of 40 000 are extracted, proving the applicability of layer transfer by Smart Cut trade to acoustic devices. An excellent matching between simulations and experimental data as well as TCF measurements are presented in this paper. |
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ISSN: | 1051-0117 |
DOI: | 10.1109/ULTSYM.2008.0049 |