Study on acoustical physical constants of ZnO single crystal using the ultrasonic microspectroscopy technology

This paper describes an investigation of determining acoustical physical constants of ZnO. We obtained three specimens of (001)-, (100)-, and (101)-ZnO crystal substrates prepared from three very small single crystals, grown by the hydrothermal synthesis method. We measured bulk-wave velocities in t...

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Bibliographic Details
Main Authors: Tanaka, T., Ohashi, Y., Arakawa, M., Kushibiki, J.-i., Sakagami, N.
Format: Conference Proceeding
Language:English
Subjects:
Acoustic measurements
acoustical physical constants
bulk wave velocity
Conductivity
Crystallization
Crystals
Frequency measurement
leaky surface acoustic wave velocity
Optical surface waves
Piezoelectricity
Surface acoustic waves
ultrasonic microspectroscopy technology
Velocity measurement
Zinc oxide
ZnO single crystal
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Summary:This paper describes an investigation of determining acoustical physical constants of ZnO. We obtained three specimens of (001)-, (100)-, and (101)-ZnO crystal substrates prepared from three very small single crystals, grown by the hydrothermal synthesis method. We measured bulk-wave velocities in the frequency range from 50 MHz to 300 MHz and LSAW velocities at 225 MHz using the ultrasonic microspectroscopy (UMS) technology. We observed that the specimens included partially conductive region inside the crystals. We determined the constants more accurately except for e 15 and e 31 .
ISSN:1051-0117
DOI:10.1109/ULTSYM.2008.0176