EHD Micro Pump using Pyrolyzed Polymer 3-D Carbon Mesh Electrodes

This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures. Low temperature SU-8 bonding method under 90degC was developed to realize wafer level carbon structure packaging. The pump...

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Bibliographic Details
Main Authors: Wakui, D., Imai, N., Nagaura, Y., Sato, H., Sekiguchi, T., Konishi, S., Shoji, S., Homma, T.
Format: Conference Proceeding
Language:English
Subjects:
Biological materials
Electrodes
Fabrication
Micropumps
Polymers
Pumps
Temperature
Voltage
Wafer bonding
Wafer scale integration
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Summary:This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures. Low temperature SU-8 bonding method under 90degC was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23 Pa and 400 nL/min under applied voltage of 500 V.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2009.4805428