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Near field microscopy of vertical cavity lasers
We show that near-field optical microscopy (NFOM) can be a powerful tool for the diagnosis and characterization of semiconductor laser structures, since it can obtain optical spectra with a spatial resolution better than 100nm. The capabilities of NFOM are demonstrated by characterizing a VCSEL in w...
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Main Authors: | , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | We show that near-field optical microscopy (NFOM) can be a powerful tool for the diagnosis and characterization of semiconductor laser structures, since it can obtain optical spectra with a spatial resolution better than 100nm. The capabilities of NFOM are demonstrated by characterizing a VCSEL in which spatial nonuniformities in the material cause a multi-mode emission pattern. |
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DOI: | 10.1109/LEOS.1995.484791 |