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Near field microscopy of vertical cavity lasers

We show that near-field optical microscopy (NFOM) can be a powerful tool for the diagnosis and characterization of semiconductor laser structures, since it can obtain optical spectra with a spatial resolution better than 100nm. The capabilities of NFOM are demonstrated by characterizing a VCSEL in w...

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Bibliographic Details
Main Authors: Kash, J.A., Pezeshki, B., Agahi, F., Kisker, D.W.
Format: Conference Proceeding
Language:English
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Summary:We show that near-field optical microscopy (NFOM) can be a powerful tool for the diagnosis and characterization of semiconductor laser structures, since it can obtain optical spectra with a spatial resolution better than 100nm. The capabilities of NFOM are demonstrated by characterizing a VCSEL in which spatial nonuniformities in the material cause a multi-mode emission pattern.
DOI:10.1109/LEOS.1995.484791