A 1.5 V supplied, CMOS ASIC for the actuation of an electrostatic micromotor

The use of electrostatic forces in micromechanical systems is well known but needs quite high voltages to produce usable forces. In this perspective paper, we present an autonomous, nonresonant, open-loop, 1.5 V battery-supplied high voltage integrated circuit able to drive an electrostatic micromot...

Full description

Saved in:
Bibliographic Details
Main Authors: Favrat, P., Paratte, L., Ballan, H., Declercq, M., de Rooij, N.F.
Format: Conference Proceeding
Language:English
Subjects:
Application specific integrated circuits
Batteries
CMOS logic circuits
CMOS technology
Electrostatics
Laboratories
Micromotors
Rotors
Stators
Voltage
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The use of electrostatic forces in micromechanical systems is well known but needs quite high voltages to produce usable forces. In this perspective paper, we present an autonomous, nonresonant, open-loop, 1.5 V battery-supplied high voltage integrated circuit able to drive an electrostatic micromotor, for opening the way to future portable applications (wristwatch like).
DOI:10.1109/MEMSYS.1996.493824