A series of ion accelerators for industry

Ion accelerators intended for application to electronics industry, surface modification and other technologies are described. A series of the accelerators are characterized by horizontal ion beam position. The energy ranges from 20 keV to 1.5 MeV. In the frame of this project, the ION-300, ION-1500...

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Bibliographic Details
Main Authors: Sukhina, B.N., Alinovsky, N.I., Chertok, I.L., Chumakov, S.N., Dikansky, N.S., Goncharov, A.D.
Format: Conference Proceeding
Language:English
Subjects:
Electronics industry
Elementary particle vacuum
Frequency
Ion accelerators
Ion beams
Power supplies
Rectifiers
Resonance
Testing
Transformers
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Description
Summary:Ion accelerators intended for application to electronics industry, surface modification and other technologies are described. A series of the accelerators are characterized by horizontal ion beam position. The energy ranges from 20 keV to 1.5 MeV. In the frame of this project, the ION-300, ION-1500 installations were designed, built and successfully tested. The main rectifier and high voltage terminals of the accelerators have a power supply of the increased frequency. The high voltage terminals are supplied with a power up to 2.2 kW using special small-size resonant transformers. The accelerators are provided with ion beam separation on full energy, oil-free vacuum, high voltage isolation (SF/sub 6/), and an intelligent automatic control system with an IBM PC host computer. A special set of technical, hardware and software decisions allows us to meet the reliability requirements.
DOI:10.1109/PAC.1995.504592