Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer

This paper presents the novel synthesis design of a three-degree of freedom silicon piezoresistive accelerometer. The purpose of this novel synthesis design is to achieve the high performance device. The design synthesis has been performed based on considerations of mechanical and electronics sensit...

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Bibliographic Details
Main Authors: Tran, T.D., Nguyen, M.D., Nguyen, L.T., Huynh, T.H., Nguyen, T.P.
Format: Conference Proceeding
Language:English
Subjects:
Acceleration
accelerometer
Accelerometers
coupled-field simulations
Design optimization
Electric resistance
Force sensors
Mechanical sensors
optimization
Piezoresistance
piezoresistive
Resonant frequency
Silicon
Surface resistance
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Summary:This paper presents the novel synthesis design of a three-degree of freedom silicon piezoresistive accelerometer. The purpose of this novel synthesis design is to achieve the high performance device. The design synthesis has been performed based on considerations of mechanical and electronics sensitivities, noise and thermal effects, respectively. The mechanical sensitivity is optimized due to combination of a FEM software and a MNA one. The electronics sensitivity, noise and thermal effect can be determined by thermal, mechanical and piezoresistive coupled-field simulations. The dimension of sensor is as small as 1.5 mm 2 , so it is suitable for many immerging applications.
DOI:10.1109/NEMS.2009.5068538