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Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer
This paper presents the novel synthesis design of a three-degree of freedom silicon piezoresistive accelerometer. The purpose of this novel synthesis design is to achieve the high performance device. The design synthesis has been performed based on considerations of mechanical and electronics sensit...
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| creator | Tran, T.D. Nguyen, M.D. Nguyen, L.T. Huynh, T.H. Nguyen, T.P. |
| description | This paper presents the novel synthesis design of a three-degree of freedom silicon piezoresistive accelerometer. The purpose of this novel synthesis design is to achieve the high performance device. The design synthesis has been performed based on considerations of mechanical and electronics sensitivities, noise and thermal effects, respectively. The mechanical sensitivity is optimized due to combination of a FEM software and a MNA one. The electronics sensitivity, noise and thermal effect can be determined by thermal, mechanical and piezoresistive coupled-field simulations. The dimension of sensor is as small as 1.5 mm 2 , so it is suitable for many immerging applications. |
| doi_str_mv | 10.1109/NEMS.2009.5068538 |
| format | conference_proceeding |
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The dimension of sensor is as small as 1.5 mm 2 , so it is suitable for many immerging applications.</description><subject>Acceleration</subject><subject>accelerometer</subject><subject>Accelerometers</subject><subject>coupled-field simulations</subject><subject>Design optimization</subject><subject>Electric resistance</subject><subject>Force sensors</subject><subject>Mechanical sensors</subject><subject>optimization</subject><subject>Piezoresistance</subject><subject>piezoresistive</subject><subject>Resonant frequency</subject><subject>Silicon</subject><subject>Surface resistance</subject><isbn>9781424446292</isbn><isbn>1424446295</isbn><isbn>9781424446308</isbn><isbn>1424446309</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2009</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><recordid>eNpNkM1KxDAcxCMiKGsfQLzkBVqT5qPJUdZdFeruQT0v-fhXI22zJGVhfXor7sE5zPCDYQ6D0A0lFaVE321WL69VTYiuBJFKMHWGCt0oymvOuWREnf_nWteXqMj5i8ziYkZ1hdpNPECP83GcPiGHjP3sHyOOHTaYlQ_bNc6hDy6OeB_gO6bf0hQOgIfgUsTGOeghxQEmSNfoojN9huKUC_S-Xr0tn8p2-_i8vG_LQBsxlZQy7pj1kvPGKccItZ5QI6iHWptGcNp5Kxx3QnpHOg3Ed1Jawaz1pgHBFuj2bzcAwG6fwmDScXf6gP0As3ZQHA</recordid><startdate>200901</startdate><enddate>200901</enddate><creator>Tran, T.D.</creator><creator>Nguyen, M.D.</creator><creator>Nguyen, L.T.</creator><creator>Huynh, T.H.</creator><creator>Nguyen, T.P.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>200901</creationdate><title>Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer</title><author>Tran, T.D. ; Nguyen, M.D. ; Nguyen, L.T. ; Huynh, T.H. ; Nguyen, T.P.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-1134c3bd6447c8c301bd01a51de29a7541fdb5c4c56dc0f9e0df66b53bbda7e53</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Acceleration</topic><topic>accelerometer</topic><topic>Accelerometers</topic><topic>coupled-field simulations</topic><topic>Design optimization</topic><topic>Electric resistance</topic><topic>Force sensors</topic><topic>Mechanical sensors</topic><topic>optimization</topic><topic>Piezoresistance</topic><topic>piezoresistive</topic><topic>Resonant frequency</topic><topic>Silicon</topic><topic>Surface resistance</topic><toplevel>online_resources</toplevel><creatorcontrib>Tran, T.D.</creatorcontrib><creatorcontrib>Nguyen, M.D.</creatorcontrib><creatorcontrib>Nguyen, L.T.</creatorcontrib><creatorcontrib>Huynh, T.H.</creatorcontrib><creatorcontrib>Nguyen, T.P.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Xplore (IEEE/IET Electronic Library - IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Tran, T.D.</au><au>Nguyen, M.D.</au><au>Nguyen, L.T.</au><au>Huynh, T.H.</au><au>Nguyen, T.P.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer</atitle><btitle>2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems</btitle><stitle>NEMS</stitle><date>2009-01</date><risdate>2009</risdate><spage>112</spage><epage>115</epage><pages>112-115</pages><isbn>9781424446292</isbn><isbn>1424446295</isbn><eisbn>9781424446308</eisbn><eisbn>1424446309</eisbn><abstract>This paper presents the novel synthesis design of a three-degree of freedom silicon piezoresistive accelerometer. The purpose of this novel synthesis design is to achieve the high performance device. The design synthesis has been performed based on considerations of mechanical and electronics sensitivities, noise and thermal effects, respectively. The mechanical sensitivity is optimized due to combination of a FEM software and a MNA one. The electronics sensitivity, noise and thermal effect can be determined by thermal, mechanical and piezoresistive coupled-field simulations. The dimension of sensor is as small as 1.5 mm 2 , so it is suitable for many immerging applications.</abstract><pub>IEEE</pub><doi>10.1109/NEMS.2009.5068538</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 9781424446292 |
| ispartof | 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2009, p.112-115 |
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| language | eng |
| recordid | cdi_ieee_primary_5068538 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acceleration accelerometer Accelerometers coupled-field simulations Design optimization Electric resistance Force sensors Mechanical sensors optimization Piezoresistance piezoresistive Resonant frequency Silicon Surface resistance |
| title | Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer |
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