SOI digital accelerometer based on pull-in time configuration

We aim to present the principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on thin silicon-on-insulator (SOI) substrate. The presented device features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The acceleromete...

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Bibliographic Details
Main Authors: Pakula, L.S., Rajaraman, V., French, P.J.
Format: Conference Proceeding
Language:English
Subjects:
Acceleration
Accelerometers
Circuits
digital accelerometer
Electrodes
Equations
Fabrication
MEMS
Microelectromechanical devices
Micromachining
Thin-SO
Time measurement
Voltage
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Description
Summary:We aim to present the principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on thin silicon-on-insulator (SOI) substrate. The presented device features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital electronic circuitry. The measurements showed a pull-in voltage of 2.7 V and a pull-in time from 0 to 1 G to be 3.2 mus.
DOI:10.1109/NEMS.2009.5068659