TOTEM POLL DRIVE DECKS FOR THE HIGH-VOLTAGE, PULSED-POWER MODULATOR FOR A LARGE-SCALE PLASMA SOURCE

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Bibliographic Details
Main Authors: Gribble, R.J., Reass, W.A.
Format: Conference Proceeding
Language:English
Subjects:
Ion implantation
Large-scale systems
Optical modulation
Plasma density
Plasma immersion ion implantation
Plasma sources
Pulse modulation
Pulse width modulation
Switches
Voltage
Online Access:Request full text
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DOI:10.1109/PPC.1993.513373