A miniature DC-70 GHz SP4T switch in 0.13-µm CMOS

This paper presents a miniature DC-70 GHz single-pole four-throw (SP4T) built in a low-cost 0.13-mum CMOS process. The switch is based on a series-shunt design with input and output matching circuits. Deep n-well (also called triple-well) CMOS transistors are used to minimize the substrate coupling....

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Bibliographic Details
Main Authors: Cetinoneri, B., Atesal, Y.A., Rebeiz, G.M.
Format: Conference Proceeding
Language:English
Subjects:
0.13-µm CMOS
CMOS process
CMOS technology
Coupling circuits
deep n-well
Frequency measurement
Impedance matching
Insertion loss
Loss measurement
millimeter wave switches
Semiconductor device measurement
SP4T switch
Switches
Switching circuits
wideband
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Summary:This paper presents a miniature DC-70 GHz single-pole four-throw (SP4T) built in a low-cost 0.13-mum CMOS process. The switch is based on a series-shunt design with input and output matching circuits. Deep n-well (also called triple-well) CMOS transistors are used to minimize the substrate coupling. Also, deep trench isolation is used between the different ports to minimize the port-to-port coupling. The SP4T results in a measured insertion loss of less than 3.5 dB up to 67 GHz with an isolation of greater than 25 dB. The measured port-to-port coupling is less than 28 dB up to 67 GHz. The measured P1dB and IIP3 are independent of frequency and are 9-10 dBm and 20-21 dBm, respectively. The active chip area is 0.24times0.23 mm 2 . To our knowledge, this work represents the widest bandwidth SP4T switch in any CMOS technology to-date.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2009.5165891