New perspectives of dielectric breakdown in low-k interconnects

An alternative method of analyzing time-dependent dielectric breakdown (TDDB) data for low-k dielectrics is presented. The analysis shows that time to breakdown is well correlated to the Poole-Frenkel emission equation, and therefore the radicE-model is a more accurate model in describing the TDDB p...

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Bibliographic Details
Main Authors: Kok-Yong Yiang, Yao, H.W., Marathe, A., Aubel, O.
Format: Conference Proceeding
Language:English
Subjects:
BEOL
Dielectric breakdown
Dielectric measurements
E-model
Equations
LAN interconnection
Leakage current
Physics
Stress
Temperature distribution
Testing
Time-dependent Dielectric Breakdown (TDDB)
Voltage
VRDB
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Description
Summary:An alternative method of analyzing time-dependent dielectric breakdown (TDDB) data for low-k dielectrics is presented. The analysis shows that time to breakdown is well correlated to the Poole-Frenkel emission equation, and therefore the radicE-model is a more accurate model in describing the TDDB physics for low-k BEOL dielectrics.
ISSN:1541-7026
1938-1891
DOI:10.1109/IRPS.2009.5173299