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Synthesis of sub-wavelength diffractive optical elements by 3D full-vectorial beam propagation method
The design method for nonperiodic sub-wavelength grating structure diffractive optical elements (DOEs) to be fabricated by direct-writing electron beam lithography in the polymer layer is described. The design is based on the application of 3D full-vectorial beam propagation method which is faster t...
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| creator | Petruskevicius, R. Kezys, D. Mikolajunas, M. Grigaliunas, V. Baltrusaitis, J. Virzonis, D. |
| description | The design method for nonperiodic sub-wavelength grating structure diffractive optical elements (DOEs) to be fabricated by direct-writing electron beam lithography in the polymer layer is described. The design is based on the application of 3D full-vectorial beam propagation method which is faster than the finite difference time domain method (FDTD) usually used for simulation of sub-wavelength vectorial DOEs. It were designed DOEs with one, two and four focal spots (focusing beam splitters) having 25 mum DOE width, 50 mum focal length, 0.1 mum width of pixels, grating profile with four levels of grey and total height of 1.29 mum for operation at the 0.6328 mum wavelength. |
| doi_str_mv | 10.1109/ICTON.2009.5185283 |
| format | conference_proceeding |
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The design is based on the application of 3D full-vectorial beam propagation method which is faster than the finite difference time domain method (FDTD) usually used for simulation of sub-wavelength vectorial DOEs. It were designed DOEs with one, two and four focal spots (focusing beam splitters) having 25 mum DOE width, 50 mum focal length, 0.1 mum width of pixels, grating profile with four levels of grey and total height of 1.29 mum for operation at the 0.6328 mum wavelength.</abstract><pub>IEEE</pub><doi>10.1109/ICTON.2009.5185283</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 2162-7339 |
| ispartof | 2009 11th International Conference on Transparent Optical Networks, 2009, p.1-4 |
| issn | 2162-7339 |
| language | eng |
| recordid | cdi_ieee_primary_5185283 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | computer generated holograms Design methodology Diffraction gratings diffractive optical elements Electron beams Electron optics electron-beam lithography Finite difference methods Lithography Optical diffraction Optical polymers Optical propagation sub-wavelength nonperiodic grating structure Time domain analysis vectorial beam propagation method |
| title | Synthesis of sub-wavelength diffractive optical elements by 3D full-vectorial beam propagation method |
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