Micro bump formation on preheated BK7-glass by excimer laser irradiation

Bump-like surface elevations on transparent materials are interesting candidates for substrate-integrated micro lenses. To create bumps of several 100 nm height on glass material, we used KrF-excimer laser irradiation of BK7- glass substrates that were preheated to 450degC. Single pulse irradiation...

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Bibliographic Details
Main Authors: Zahariev, P., Mechkarov, N., Danev, G., Ihlemann, J.
Format: Conference Proceeding
Language:English
Subjects:
Glass
Laser theory
Lenses
Optical arrays
Optical materials
Optical pulses
Physics
Surface emitting lasers
Surface topography
Ultrafast optics
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Summary:Bump-like surface elevations on transparent materials are interesting candidates for substrate-integrated micro lenses. To create bumps of several 100 nm height on glass material, we used KrF-excimer laser irradiation of BK7- glass substrates that were preheated to 450degC. Single pulse irradiation of a spot of 20 mum diameter at a fluence of 10 J/cm 2 leads to a surface elevation of about 500 nm. Thus, by preheating the sample to about 450degC, the glass transition of Tg = 557degC can be reached by one single laser pulse, so that softening of the irradiated volume and reshaping of the surface under the action of the surface tension is induced. This method could be extended to rapid parallel fabrication of micro lens arrays.
DOI:10.1109/CLEOE-EQEC.2009.5192284