The study of the optical properties of In/sub 0.52/(Al/sub x/Ga/sub 1-x/)/sub 0.48/As by variable angle spectroscopic ellipsometry

The optical properties of In/sub 0.52/(Al/sub x/Ga/sub 1-x/)/sub 0.48/As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined. The energies and broadening parameters...

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Bibliographic Details
Main Authors: Pan, J.-W., Shieh, J.-L., Gau, J.-H., Chyi, J.-I.
Format: Conference Proceeding
Language:English
Subjects:
Ellipsometry
Indium phosphide
Molecular beam epitaxial growth
Optical films
Optical refraction
Optical variables control
Refractive index
Spectroscopy
Substrates
Thickness measurement
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Summary:The optical properties of In/sub 0.52/(Al/sub x/Ga/sub 1-x/)/sub 0.48/As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined. The energies and broadening parameters of the E/sub 1/ and E/sub 1/+/spl Delta//sub 1/ transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between our results and the reported data is presented.
DOI:10.1109/ICIPRM.1995.522125