Simulation of Microhollow Cathode Discharge With Planar and Hollow Anodes

The 3-D fluid models of microhollow cathode discharge (MHCD) with both planar- and hollow-anode structures are presented. In the planar-anode structure, the highest densities are ~10 18 and ~10 19 m -3 for electron and ion, respectively, and the electron mean energy is in tens of electronvolts. In t...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on plasma science 2009-10, Vol.37 (10), p.2055-2060
Main Authors: Zhang, X, Wang, X, Liu, F, Lu, Y
Format: Article
Language:English
Subjects:
Anodes
Cathodes
Computational fluid dynamics
Computer simulation
Density
Dielectrics
Discharge
Electrodes
Electron density
electron mean energy
Electron mobility
Exact sciences and technology
Fluid flow
Fluids
Geometry
Glow discharges
hollow anode
Ionization
Magnetohydrodynamic and fluid equation
microhollow cathode discharge (MHCD)
Nanoscale devices
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
planar anode
Plasma simulation
Poisson equations
Simulation
Three dimensional imaging
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The 3-D fluid models of microhollow cathode discharge (MHCD) with both planar- and hollow-anode structures are presented. In the planar-anode structure, the highest densities are ~10 18 and ~10 19 m -3 for electron and ion, respectively, and the electron mean energy is in tens of electronvolts. In the hollow-anode structure, densities and electron mean energy are higher than in planar one, which indicates that this structure is more attractive than the planar one. The influences of pressure on the MHCD have also been discussed.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2009.2029108