High Aspect-Ratio Coplanar Waveguide Wideband Bandpass Filter With Compact Unit Cells

This paper introduces a micromachined thick single-metal-layer high aspect-ratio coplanar waveguide (CPW) wideband bandpass filter with compact unit cells based on the electromagnetic bandgap (EBG) concept. The filter is miniaturized as a result of using the EBG concept in design, and also by realiz...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2009-11, Vol.57 (11), p.2753-2760
Main Authors: Klymyshyn, D.M., Jayatilaka, H.C., Borner, M., Mohr, J.
Format: Article
Language:English
Subjects:
Applied sciences
Band pass filters
Bandpass filter
Bandpass filters
Bandwidth
Circuit properties
coplanar waveguide (CPW) transmission line
Coplanar waveguides
deep X-ray lithography
Electric, optical and optoelectronic circuits
Electromagnetic waveguides
electromagnetic-bandgap (EBG) structures
Electronic circuits
Electronics
Exact sciences and technology
Frequency filters
high aspect ratio
Lithography
Metamaterials
Microelectronic fabrication (materials and surfaces technology)
microfabrication
micromachining
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Microwaves
Oscillators, resonators, synthetizers
Periodic structures
Polymers
Resonator filters
RF microelectromechanical systems (MEMS)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Unit cell
Wideband
X-ray lithography
X-rays
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Summary:This paper introduces a micromachined thick single-metal-layer high aspect-ratio coplanar waveguide (CPW) wideband bandpass filter with compact unit cells based on the electromagnetic bandgap (EBG) concept. The filter is miniaturized as a result of using the EBG concept in design, and also by realizing high aspect-ratio structures with polymer-based deep X-ray lithography fabrication. Cascaded unit cells in the EBG model consist of capacitive and inductive parallel periodically loaded transmission lines, which determine the filter bandwidth. Compact unit cells are realized by using high aspect-ratio CPW stepped-impedance resonators. The main advantage of this approach is that the high aspect-ratio CPW structures make short unit cells practically realizable, resulting in a compact filter structure. A bandpass filter with 47% bandwidth is designed and fabricated using deep X-ray lithography, and the performance and physical size is compared to a conventional quarter-wavelength-based admittance inverter filter.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2009.2032347