Bistable switching with a thermoelectrically driven thermopneumatic actuator

We present for the first time a bistable thermopneumatic actuator that is based on thermoelectric temperature control. This concept shows several advantages over common thermopneumatic actuators: Due to an active cooling, the reaction time is decreased. Further, positive and negative displacements o...

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Bibliographic Details
Main Authors: Ruhhammer, J., Huesgen, T., Woias, P.
Format: Conference Proceeding
Language:English
Subjects:
Actuator
Actuators
Biomembranes
Bistable
Cooling
Fabrication
Hysteresis
Microvalves
Peltier cooler
Switches
Temperature control
Testing
Thermoelectricity
thermopneumatic
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Summary:We present for the first time a bistable thermopneumatic actuator that is based on thermoelectric temperature control. This concept shows several advantages over common thermopneumatic actuators: Due to an active cooling, the reaction time is decreased. Further, positive and negative displacements of the membrane are enabled and allow for a bistable switching. A novel fabrication technology is established and a prototype device is fabricated. Preliminary test results indicate a membrane displacement of 41 mum at an operation frequency of 3.8 Hz, which proves the feasibility of the concept.
ISSN:2159-547X
DOI:10.1109/SENSOR.2009.5285570