Feedback enhanced thermo-electric topography sensing

Thermo-electric sensors in micro-fabricated silicon cantilevers are used in a variety of applications that exploit their temperature-dependent conductivity. While the ease and low cost of integration makes their application attractive, their low sensing bandwidth presents a significant disadvantage....

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Bibliographic Details
Main Authors: Sebastian, A., Wiesmann, D., Baechtold, P., Rothuizen, H., Despont, M., Drechsler, U.
Format: Conference Proceeding
Language:English
Subjects:
Bandwidth
Feedback
Micro-cantilevers
Power system modeling
Silicon
Surfaces
Temperature sensors
Thermal resistance
Thermal sensors
thermo-electric sensing
topography sensing
Transfer functions
Voltage
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Description
Summary:Thermo-electric sensors in micro-fabricated silicon cantilevers are used in a variety of applications that exploit their temperature-dependent conductivity. While the ease and low cost of integration makes their application attractive, their low sensing bandwidth presents a significant disadvantage. In this article we present a novel scheme for enhancing the sensitivity and bandwidth of these sensors using an external feedback. This scheme demonstrates the applicability of feedback control to shape a sensor's sensing dynamics.
ISSN:2159-547X
DOI:10.1109/SENSOR.2009.5285675