Characterization of water vapor permeation through thin film Parylene C

A microfluidic structure to measure water vapor permeation through thin film Parylene C was successfully fabricated and tested. Chips were re-tested multiple times with consistent results. These chips were tested at 20degC, 30%RH and measured WVTR data that matched equivalent wet-cup/beaker tests, s...

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Main Authors: Menon, P.R., Li, W., Tooker, A., Tai, Y.C.
Format: Conference Proceeding
Language:English
Subjects:
Microchannel
Microfluidics
Micromechanical devices
Optical films
Parylene C
Polyimides
Reservoirs
Semiconductor device measurement
Temperature
Testing
Transistors
Water vapor permeation
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creator Menon, P.R.
Li, W.
Tooker, A.
Tai, Y.C.
description A microfluidic structure to measure water vapor permeation through thin film Parylene C was successfully fabricated and tested. Chips were re-tested multiple times with consistent results. These chips were tested at 20degC, 30%RH and measured WVTR data that matched equivalent wet-cup/beaker tests, showing that these devices are indeed functional and can be used to measure WVTR with repeatable reliability. Using the Arrhenius Relation and varied temperature testing, activation energies were determined for water vapor through Parylene C that agree closely with literature and also better predicts Parylene C behavior than the previously reported activation energy.
doi_str_mv 10.1109/SENSOR.2009.5285687
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subjects Microchannel
Microfluidics
Micromechanical devices
Optical films
Parylene C
Polyimides
Reservoirs
Semiconductor device measurement
Temperature
Testing
Transistors
Water vapor permeation
title Characterization of water vapor permeation through thin film Parylene C
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