High aspect ratio microelectromechanical systems: A versatile approach using carbon nanotubes as a framework

• Main Authors: Hutchison, D.N., Aten, Q., Turner, B., Morrill, N., Howell, L.L., Jensen, B.D., Davis, R.C., Vanfleet, R.R.
• Format: Conference Proceeding
• Language: English
• Subjects: Carbon nanotubes; Chemical processes; chemical vapor infiltration; comb actuators; Fabrication; Filling; high aspect ratio; Microelectromechanical systems; Micromechanical devices; Microstructure; Nanostructured materials; Nanostructures; Silicon; Vertically aligned carbon nanotubes
• ISSN: 2159-547X
• DOI: 10.1109/SENSOR.2009.5285766

We recently developed a fabrication process for carbon nanotube templated MEMS. The fabrication process involves growing a three dimensional pattern from carbon nanotube forests and filling that forest by chemical vapor infiltration to make a solid structure. This templating process allows us to fabricate extremely high aspect ratio microscale structures from a wide variety of materials. The nanotube structures can be hundreds of microns tall with lateral pattern dimensions down to a few microns. The chemical vapor infiltration has been shown with silicon and silicon nitride but could be extended to many other materials. In this paper, we investigate the microstructure of the filling material and extend the process to the fabrication of comb actuators.