Industrial applications of cathodic-arc and RF/DC magnetron plasma

Summary form only given. Wear resistant, anti-corrosive and decorative thin films for industrial application were developed using cathodic-arc and magnetron plasmas. Carbonitride films using cathodic-arc plasma have been developed for wear-resistant applications-cutting tools and dies. Decorative Zr...

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Bibliographic Details
Main Authors: Eun-Hyun Bae, Min-Suk Oh, Jun-Hee Hong, Jin-Woo Jun, Jin-An Jung, Han-Bong Kim
Format: Conference Proceeding
Language:English
Subjects:
Geometry
Hydrogen
Plasma applications
Plasma density
Plasma materials processing
Plasma properties
Plasma sources
Plasma temperature
Radio frequency
Thermal spraying
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Description
Summary:Summary form only given. Wear resistant, anti-corrosive and decorative thin films for industrial application were developed using cathodic-arc and magnetron plasmas. Carbonitride films using cathodic-arc plasma have been developed for wear-resistant applications-cutting tools and dies. Decorative ZrC/sub x/N/sub y/, and TiC/sub x/N/sub y/ films were developed for kitchen tools-bowls, spoons, knives and gas range's outer covers. Anti-corrosive, decorative AlN and Ti(Zr)CN hard-coating techniques for cold-rolled steel plate were developed using cathodic arc and DC/RF magnetron plasmas. Wear resistant transparent diamond-like-carbon (DLC) film for eye glasses was developed using RF magnetron and modified cathodic-arc plasmas.
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.1995.531624