A study on novel electrostatic suspension system using piezo actuators

A study on new type of electrostatic suspension of silicon wafer, featuring ldquousing piezo actuators to control the positions of movable electroderdquo, has been reported. A novel aspect of this system is movable electrodes are used instead of stationary electrodes utilized in previous suspension...

Full description

Saved in:
Bibliographic Details
Main Authors: Truyen The Le, Jong Up Jeon, Young-Jin Yum, Sung-Woo Park, Hyun-Woo Lim
Format: Conference Proceeding
Language:English
Subjects:
Capacitance
Electrodes
Electrostatic actuators
Electrostatic suspension
Feedback control
Force control
Piezo actuator
Piezoelectric actuators
Prototypes
Semiconductor device modeling
Silicon
Silicon wafer
Voltage control
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A study on new type of electrostatic suspension of silicon wafer, featuring ldquousing piezo actuators to control the positions of movable electroderdquo, has been reported. A novel aspect of this system is movable electrodes are used instead of stationary electrodes utilized in previous suspension system. By using a rapid deformation of the piezoelectric (PZT) actuator, the movement of the movable electrodes which are supplied by constant voltage is controlled. As a consequence the electrostatic forces are controlled by varying the capacitance formed by the movable electrodes and the suspended object. In this paper, a brief review of basic principles is presented. This is followed by a description of the structure of a prototype mechanism, including electrode and mechanical amplifier design, dynamic model of system, and the position feedback control method. Simulation and experimental results, which demonstrate completely suspension of 4-inch silicon wafer without any mechanical contact, are also presented.