Micromechanical optical spectral devices with electrostatic control

Interference filters are widely used in physical research, measuring equipment, and industry. Their advantages are simplicity and comfort of operation, high monochromaticity of radiation emitted from optical filter. Such devices can get additional advantages, if they are able to tune the allocated b...

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Bibliographic Details
Main Authors: Nikulin, D.M., Chesnokov, V.V., Chesnokov, D.V.
Format: Conference Proceeding
Language:English
Subjects:
Bandwidth
electric control of the air gap
Electrical equipment industry
Electrostatic measurements
Interference
Interference filters
micro-and nanotechnology
Micromechanical devices
Nanotechnology
Optical control
Optical devices
Optical filters
Stimulated emission
Online Access:Request full text
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Summary:Interference filters are widely used in physical research, measuring equipment, and industry. Their advantages are simplicity and comfort of operation, high monochromaticity of radiation emitted from optical filter. Such devices can get additional advantages, if they are able to tune the allocated bandwidth, that can be achieved using micro- and nanotechnology. In the tunable interference optic filters the electric control of the air gap between the mirrors of the Fabry-Perot is used at the gap corresponding to the first order of interference. In the multiplex filter version considered in the report, achievable tuning free range of the spectrum is 0.4-0.8 mum with a resolution of 0.75-1.3 nm.
DOI:10.1109/INTERNANO.2009.5335622